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Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets

Zhu, H. / Hupkes, J. / Bunte, E. / Huang, S. M.

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Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets

Zhu, H. / Hupkes, J. / Bunte, E. / Huang, S. M.

Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets

Zhu, H. / Hupkes, J. / Bunte, E. / Huang, S. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Reactive sputtering of ZnO:Al thin films from rotatable dual metallic targets

Contributors:

Zhu, H. (author) / Hupkes, J. (author) / Bunte, E. (author) / Huang, S. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 259 ; 582-589

Publication date:

2012-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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