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Influence of helium dilution of silane on microstructure and opto-electrical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by HW-CVD
Influence of helium dilution of silane on microstructure and opto-electrical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by HW-CVD
Influence of helium dilution of silane on microstructure and opto-electrical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by HW-CVD
Waman, V. S. (author) / Kamble, M. M. (author) / Ghosh, S. S. (author) / Hawaldar, R. R. (author) / Amalnerkar, D. P. (author) / Sathe, V. G. (author) / Gosavi, S. W. (author) / Jadkar, S. R. (author)
MATERIALS RESEARCH BULLETIN ; 47 ; 3445-3451
2012-01-01
7 pages
Article (Journal)
English
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