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Lithography: Resolution Limit in Plasmonic Lithography for Practical Applications beyond 2x-nm Half Pitch (Adv. Mater. 44/2012)
Lithography: Resolution Limit in Plasmonic Lithography for Practical Applications beyond 2x-nm Half Pitch (Adv. Mater. 44/2012)
Lithography: Resolution Limit in Plasmonic Lithography for Practical Applications beyond 2x-nm Half Pitch (Adv. Mater. 44/2012)
Kim, S. (author) / Jung, H. (author) / Kim, Y. (author) / Jang, J. (author) / Hahn, J. W. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 24 ; OP273-OP273
2012-01-01
OP273-OP273
Article (Journal)
English
DDC:
620.11
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Resolution Limit in Plasmonic Lithography for Practical Applications beyond 2x-nm Half Pitch
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