Precision Tool Condition Monitoring for Grinding Wheel in IC Manufacturing of Silicon Wafer: Fid-Bau Portal

Precision Tool Condition Monitoring for Grinding Wheel in IC Manufacturing of Silicon Wafer

Hsu, Y.-C. / Pearn, W.L. / Chuang, Y.-F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Precision Tool Condition Monitoring for Grinding Wheel in IC Manufacturing of Silicon Wafer

Hsu, Y.-C. / Pearn, W.L. / Chuang, Y.-F.

Precision Tool Condition Monitoring for Grinding Wheel in IC Manufacturing of Silicon Wafer

Hsu, Y.-C. / Pearn, W.L. / Chuang, Y.-F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Precision Tool Condition Monitoring for Grinding Wheel in IC Manufacturing of Silicon Wafer

Contributors:

Hsu, Y.-C. (author) / Pearn, W.L. (author) / Chuang, Y.-F. (author)

Published in:

JOURNAL OF TESTING AND EVALUATION ; 40 ; 916-922

Publication date:

2012-01-01

Size:

7 pages

ISSN:

0090-3973

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620

Kang, R.K. / Gao, S. / Jin, Z.J. et al. | British Library Online Contents | 2009

Ultra Precision Grinding of Wafer Scale

Hunten, M. / Klocke, F. / Dambon, O. et al. | British Library Online Contents | 2012

Precision form Grinding of Ceramic Materials with Diamond Grinding Wheel

Cui, Z.M. / Zhu, D.J. / Du, L. | British Library Online Contents | 2008

Residual stress analysis on silicon wafer surface layers induced by ultra-precision grinding

Zhang, Y. / Wang, D. / Gao, W. et al. | British Library Online Contents | 2011

Dynamic Monitoring and Intelligent Dressing of Diamond Wheel for Precision Curve Grinding

Wan, D. P. / Hu, D. J. / Wang, H. F. et al. | British Library Online Contents | 2007