The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films: Fid-Bau Portal

The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films

Hung, F.Y. / Lui, T.S. / Hu, Z.S. / Chang, S.J. / Chen, L.H. / Chen, K.J.

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The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films

Hung, F.Y. / Lui, T.S. / Hu, Z.S. / Chang, S.J. / Chen, L.H. / Chen, K.J.

The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films

Hung, F.Y. / Lui, T.S. / Hu, Z.S. / Chang, S.J. / Chen, L.H. / Chen, K.J.

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Document information

Title:

The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films

Contributors:

Hung, F.Y. (author) / Lui, T.S. (author) / Hu, Z.S. (author) / Chang, S.J. (author) / Chen, L.H. (author) / Chen, K.J. (author)

Published in:

Special Issue on Crystallographic Orientation Distribution and Related Properties in Advanced Materials III ; 2049-2055

MATERIALS TRANSACTIONS ; 53

Publication date:

2012-01-01

Size:

7 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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