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    Evaluation of residual stress in sputtered tantalum thin-film

    New search for: Al-masha'al, Asa'ad
    New search for: Bunting, Andrew
    New search for: Cheung, Rebecca

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    Evaluation of residual stress in sputtered tantalum thin-film

    New search for: Al-masha'al, Asa'ad
    New search for: Bunting, Andrew
    New search for: Cheung, Rebecca

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Evaluation of residual stress in sputtered tantalum thin-film

    New search for: Al-masha'al, Asa'ad
    New search for: Bunting, Andrew
    New search for: Cheung, Rebecca

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Evaluation of residual stress in sputtered tantalum thin-film

    Contributors:

    Al-masha'al, Asa'ad (author) / Bunting, Andrew (author) / Cheung, Rebecca (author)

    Published in:

    Applied surface science ; 371 ; 571-575

    Publication date:

    2016-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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