The structure and optical properties of silicon nanowires prepared by inductively coupled plasma chemical vapor deposition

Qin, Y. / Li, F. / Liu, D. et al. | British Library Online Contents | 2011

Relatively low temperature synthesis of graphene by radio frequency plasma enhanced chemical vapor deposition

Qi, J. L. / Zheng, W. T. / Zheng, X. H. et al. | British Library Online Contents | 2011

Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition

Chattopadhyay, K. K. / Banerjee, A. N. / Kundoo, S. | British Library Online Contents | 2003

Inductively coupled plasma - plasma enhanced chemical vapor deposition silicon nitride for passivation of InP based high electron mobility transistors (HEMTs)

Medjdoub, M. / Courant, J. L. / Maher, H. et al. | British Library Online Contents | 2001

Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition

Jun, B.-H. / Joon Sing Lee / Kim, D.-W. et al. | British Library Online Contents | 1999