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Research on Zero Bias Characteristic of MEMS Accelerometer in FBW

Zhong, L.C. / Wang, J.Z. / Shi, J.D.

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Research on Zero Bias Characteristic of MEMS Accelerometer in FBW

Zhong, L.C. / Wang, J.Z. / Shi, J.D.

Research on Zero Bias Characteristic of MEMS Accelerometer in FBW

Zhong, L.C. / Wang, J.Z. / Shi, J.D.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Research on Zero Bias Characteristic of MEMS Accelerometer in FBW

Contributors:

Zhong, L.C. (author) / Wang, J.Z. (author) / Shi, J.D. (author) / Tang, F.

Published in:

MICRO-NANO TECHNOLOGY XV ; 1046-1052

KEY ENGINEERING MATERIALS ; 609/610

Publication date:

2014-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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