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Uniformity and Morphology of 10 x 100mm 4^o Off-Axis 4H-SiC Epitaxial Layers and their Effect on Device Performance
Uniformity and Morphology of 10 x 100mm 4^o Off-Axis 4H-SiC Epitaxial Layers and their Effect on Device Performance
Uniformity and Morphology of 10 x 100mm 4^o Off-Axis 4H-SiC Epitaxial Layers and their Effect on Device Performance
Das, H. (author) / Sunkari, S. (author) / Oldham, T. (author) / Rodgers, J. (author) / Casady, J. (author) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A. / Levinshtein, M.E.
2013-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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