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    Compliant electrostatic chuck based on hairy microstructure

    New search for: Saito, S.
    New search for: Soda, F.
    New search for: Dhelika, R.
    New search for: Takahashi, K.
    New search for: Takarada, W.
    New search for: Kikutani, T.

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    Compliant electrostatic chuck based on hairy microstructure

    New search for: Saito, S.
    New search for: Soda, F.
    New search for: Dhelika, R.
    New search for: Takahashi, K.
    New search for: Takarada, W.
    New search for: Kikutani, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Compliant electrostatic chuck based on hairy microstructure

    New search for: Saito, S.
    New search for: Soda, F.
    New search for: Dhelika, R.
    New search for: Takahashi, K.
    New search for: Takarada, W.
    New search for: Kikutani, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Compliant electrostatic chuck based on hairy microstructure

    Contributors:

    Saito, S. (author) / Soda, F. (author) / Dhelika, R. (author) / Takahashi, K. (author) / Takarada, W. (author) / Kikutani, T. (author)

    Published in:

    Focus issue: Bioinspired smart materials and systems ; 015019

    SMART MATERIALS AND STRUCTURES ; 22

    Publication date:

    2013-01-01

    Size:

    15019 pages

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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