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    Effect of substrate biasing and temperature on AlN thin film deposited by cathodic arc ion

    New search for: Khan, S.
    New search for: Mehmood, M.
    New search for: Saeed, S.
    New search for: Khan, Taj.M.
    New search for: Sadiq, G.
    New search for: Ahmed, I.

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    Effect of substrate biasing and temperature on AlN thin film deposited by cathodic arc ion

    New search for: Khan, S.
    New search for: Mehmood, M.
    New search for: Saeed, S.
    New search for: Khan, Taj.M.
    New search for: Sadiq, G.
    New search for: Ahmed, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of substrate biasing and temperature on AlN thin film deposited by cathodic arc ion

    New search for: Khan, S.
    New search for: Mehmood, M.
    New search for: Saeed, S.
    New search for: Khan, Taj.M.
    New search for: Sadiq, G.
    New search for: Ahmed, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of substrate biasing and temperature on AlN thin film deposited by cathodic arc ion

    Contributors:

    Khan, S. (author) / Mehmood, M. (author) / Saeed, S. (author) / Khan, Taj.M. (author) / Sadiq, G. (author) / Ahmed, I. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 16 ; 640-646

    Publication date:

    2013-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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