A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
ATOMIC LAYER DEPOSITION WITH PASSIVATION TREATMENT
A method includes: 1) performing an atomic layer deposition cycle including (a) introducing precursors into a deposition chamber housing a substrate to deposit a material on the substrate; and (b) introducing a passivation gas into the deposition chamber to passivate a surface of the material; and 2) repeating 1) a plurality of times to form a film of the material.
ATOMIC LAYER DEPOSITION WITH PASSIVATION TREATMENT
A method includes: 1) performing an atomic layer deposition cycle including (a) introducing precursors into a deposition chamber housing a substrate to deposit a material on the substrate; and (b) introducing a passivation gas into the deposition chamber to passivate a surface of the material; and 2) repeating 1) a plurality of times to form a film of the material.
ATOMIC LAYER DEPOSITION WITH PASSIVATION TREATMENT
ATOMLAGENABSCHEIDUNG MIT PASSIVIERUNGSBEHANDLUNG
DÉPÔT DE COUCHE ATOMIQUE AVEC TRAITEMENT DE PASSIVATION
PRINZ FRIEDRICH B (author) / XU SHICHENG (author) / ENGLISH TIMOTHY (author) / PROVINE JOHN (author) / THIAN DICKSON (author) / TORGERSEN JAN (author)
2020-05-20
Patent
Electronic Resource
English
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