Influence of the C"2H"2 flow rate on gradient TiCN films deposited by multi-arc ion plating: Fid-Bau Portal

Influence of the C"2H"2 flow rate on gradient TiCN films deposited by multi-arc ion plating

Li, J. / Zhang, S. / Li, M.

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Influence of the C"2H"2 flow rate on gradient TiCN films deposited by multi-arc ion plating

Li, J. / Zhang, S. / Li, M.

Influence of the C"2H"2 flow rate on gradient TiCN films deposited by multi-arc ion plating

Li, J. / Zhang, S. / Li, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Influence of the C"2H"2 flow rate on gradient TiCN films deposited by multi-arc ion plating

Contributors:

Li, J. (author) / Zhang, S. (author) / Li, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 283 ; 134-144

Publication date:

2013-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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