Effect of aluminum plasma parameters on the physical properties of Ti-Al-N thin films deposited by reactive crossed beam pulsed laser deposition: Fid-Bau Portal

Effect of aluminum plasma parameters on the physical properties of Ti-Al-N thin films deposited by reactive crossed beam pulsed laser deposition

Escobar-Alarcon, L. / Solis-Casados, D. A. / Romero, S. / Fernandez, M. / Perez-Alvarez, J. / Haro-Poniatowski, E.

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Effect of aluminum plasma parameters on the physical properties of Ti-Al-N thin films deposited by reactive crossed beam pulsed laser deposition

Escobar-Alarcon, L. / Solis-Casados, D. A. / Romero, S. / Fernandez, M. / Perez-Alvarez, J. / Haro-Poniatowski, E.

Effect of aluminum plasma parameters on the physical properties of Ti-Al-N thin films deposited by reactive crossed beam pulsed laser deposition

Escobar-Alarcon, L. / Solis-Casados, D. A. / Romero, S. / Fernandez, M. / Perez-Alvarez, J. / Haro-Poniatowski, E.

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Check availability in my library

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Document information

Title:

Effect of aluminum plasma parameters on the physical properties of Ti-Al-N thin films deposited by reactive crossed beam pulsed laser deposition

Contributors:

Escobar-Alarcon, L. (author) / Solis-Casados, D. A. (author) / Romero, S. (author) / Fernandez, M. (author) / Perez-Alvarez, J. (author) / Haro-Poniatowski, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 283 ; 808-812

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Lambert, L. / Grangeon, F. / Autric, M. | British Library Online Contents | 1999

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Plasma parameters in pulsed laser-plasma deposition of thin films

Metev, S. / Ozegowski, M. / Sepold, G. et al. | British Library Online Contents | 1996

Boron nitride thin films deposited by RF plasma reactive pulsed laser ablation

Marotta, V. / Orlando, S. / Parisi, G. P. et al. | British Library Online Contents | 2003

Properties of BaTiO3 thin films deposited by radiofrequency beam discharge assisted pulsed laser deposition

Canulescu, S. / Dinescu, G. / Epurescu, G. et al. | British Library Online Contents | 2004