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    Nitrogen Content Influence on Optical Properties of DC Magnetron Sputtered Copper Nitride Films

    New search for: Wang, S.Y.
    New search for: Yuan, N.Y.
    New search for: Ding, J.N.
    New search for: Tang, F.

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    Nitrogen Content Influence on Optical Properties of DC Magnetron Sputtered Copper Nitride Films

    New search for: Wang, S.Y.
    New search for: Yuan, N.Y.
    New search for: Ding, J.N.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nitrogen Content Influence on Optical Properties of DC Magnetron Sputtered Copper Nitride Films

    New search for: Wang, S.Y.
    New search for: Yuan, N.Y.
    New search for: Ding, J.N.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Nitrogen Content Influence on Optical Properties of DC Magnetron Sputtered Copper Nitride Films

    Contributors:

    Wang, S.Y. (author) / Yuan, N.Y. (author) / Ding, J.N. (author) / Tang, F.

    Published in:

    Micro-Nano Technology XIV ; 1001-1007

    KEY ENGINEERING MATERIALS ; 562/565

    Publication date:

    2013-01-01

    Size:

    7 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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