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    Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating

    New search for: Singh, A. V.
    New search for: Chandra, S.
    New search for: Srivastava, A. K.
    New search for: Chakroborty, B. R.
    New search for: Sehgal, G.
    New search for: Dalai, M. K.
    New search for: Bose, G.

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    Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating

    New search for: Singh, A. V.
    New search for: Chandra, S.
    New search for: Srivastava, A. K.
    New search for: Chakroborty, B. R.
    New search for: Sehgal, G.
    New search for: Dalai, M. K.
    New search for: Bose, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating

    New search for: Singh, A. V.
    New search for: Chandra, S.
    New search for: Srivastava, A. K.
    New search for: Chakroborty, B. R.
    New search for: Sehgal, G.
    New search for: Dalai, M. K.
    New search for: Bose, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating

    Contributors:

    Singh, A. V. (author) / Chandra, S. (author) / Srivastava, A. K. (author) / Chakroborty, B. R. (author) / Sehgal, G. (author) / Dalai, M. K. (author) / Bose, G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 9568-9573

    Publication date:

    2011-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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