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Optical properties of non-stoichiometric sputtered zirconium nitride films

Benia, H. M. / Guemmaz, M. / Schmerber, G. / Mosser, A. / Parlebas, J. C.

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Optical properties of non-stoichiometric sputtered zirconium nitride films

Benia, H. M. / Guemmaz, M. / Schmerber, G. / Mosser, A. / Parlebas, J. C.

Optical properties of non-stoichiometric sputtered zirconium nitride films

Benia, H. M. / Guemmaz, M. / Schmerber, G. / Mosser, A. / Parlebas, J. C.

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Check availability in my library

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Document information

Title:

Optical properties of non-stoichiometric sputtered zirconium nitride films

Contributors:

Benia, H. M. (author) / Guemmaz, M. (author) / Schmerber, G. (author) / Mosser, A. (author) / Parlebas, J. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 211 ; 146-155

Publication date:

2003-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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