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    The Electrical and Optical Properties of Fe-O-N Thin Films Deposited by RF Magnetron Sputtering

    New search for: Ogawa, Y.
    New search for: Ando, D.
    New search for: Sutou, Y.
    New search for: Koike, J.

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    The Electrical and Optical Properties of Fe-O-N Thin Films Deposited by RF Magnetron Sputtering

    New search for: Ogawa, Y.
    New search for: Ando, D.
    New search for: Sutou, Y.
    New search for: Koike, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The Electrical and Optical Properties of Fe-O-N Thin Films Deposited by RF Magnetron Sputtering

    New search for: Ogawa, Y.
    New search for: Ando, D.
    New search for: Sutou, Y.
    New search for: Koike, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    The Electrical and Optical Properties of Fe-O-N Thin Films Deposited by RF Magnetron Sputtering

    Contributors:

    Ogawa, Y. (author) / Ando, D. (author) / Sutou, Y. (author) / Koike, J. (author)

    Published in:

    MATERIALS TRANSACTIONS ; 54 ; 2055-2058

    Publication date:

    2013-01-01

    Size:

    4 pages

    ISSN:

    1345-9678

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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