Optical and electrical properties of Ti(Cr)O2:N thin films deposited by magnetron co-sputtering: Fid-Bau Portal

Optical and electrical properties of Ti(Cr)O2:N thin films deposited by magnetron co-sputtering

Kollbek, K. / Szkudlarek, A. / Marzec, M. M. / Lyson-Sypien, B. / Cecot, M. / Bernasik, A. / Radecka, M. / Zakrzewska, K.

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Optical and electrical properties of Ti(Cr)O2:N thin films deposited by magnetron co-sputtering

Kollbek, K. / Szkudlarek, A. / Marzec, M. M. / Lyson-Sypien, B. / Cecot, M. / Bernasik, A. / Radecka, M. / Zakrzewska, K.

Optical and electrical properties of Ti(Cr)O2:N thin films deposited by magnetron co-sputtering

Kollbek, K. / Szkudlarek, A. / Marzec, M. M. / Lyson-Sypien, B. / Cecot, M. / Bernasik, A. / Radecka, M. / Zakrzewska, K.

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Document information

Title:

Optical and electrical properties of Ti(Cr)O2:N thin films deposited by magnetron co-sputtering

Contributors:

Kollbek, K. (author) / Szkudlarek, A. (author) / Marzec, M. M. (author) / Lyson-Sypien, B. (author) / Cecot, M. (author) / Bernasik, A. (author) / Radecka, M. (author) / Zakrzewska, K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 380 ; 73-82

Publication date:

2016-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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