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    A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance

    New search for: Kubicek, M.
    New search for: Holzlechner, G.
    New search for: Opitz, A. K.
    New search for: Larisegger, S.
    New search for: Hutter, H.
    New search for: Fleig, J.

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    A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance

    New search for: Kubicek, M.
    New search for: Holzlechner, G.
    New search for: Opitz, A. K.
    New search for: Larisegger, S.
    New search for: Hutter, H.
    New search for: Fleig, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance

    New search for: Kubicek, M.
    New search for: Holzlechner, G.
    New search for: Opitz, A. K.
    New search for: Larisegger, S.
    New search for: Hutter, H.
    New search for: Fleig, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance

    Contributors:

    Kubicek, M. (author) / Holzlechner, G. (author) / Opitz, A. K. (author) / Larisegger, S. (author) / Hutter, H. (author) / Fleig, J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 289 ; 407-416

    Publication date:

    2014-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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