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Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

Khuat, V. / Ma, Y. / Si, J. / Chen, T. / Chen, F. / Hou, X.

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Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

Khuat, V. / Ma, Y. / Si, J. / Chen, T. / Chen, F. / Hou, X.

Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

Khuat, V. / Ma, Y. / Si, J. / Chen, T. / Chen, F. / Hou, X.

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Order at Subito €

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Document information

Title:

Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

Contributors:

Khuat, V. (author) / Ma, Y. (author) / Si, J. (author) / Chen, T. (author) / Chen, F. (author) / Hou, X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 289 ; 529-532

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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