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Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses

Aubry, E. / Weber, S. / Billard, A. / Martin, N.

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Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses

Aubry, E. / Weber, S. / Billard, A. / Martin, N.

Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses

Aubry, E. / Weber, S. / Billard, A. / Martin, N.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Silicon oxynitride thin films synthesised by the reactive gas pulsing process using rectangular pulses

Contributors:

Aubry, E. (author) / Weber, S. (author) / Billard, A. (author) / Martin, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 10065-10071

Publication date:

2011-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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