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Surface/interface analysis and optical properties of RF sputter-deposited nanocrystalline titanium nitride thin films
Surface/interface analysis and optical properties of RF sputter-deposited nanocrystalline titanium nitride thin films
Surface/interface analysis and optical properties of RF sputter-deposited nanocrystalline titanium nitride thin films
White, N. (author) / Campbell, A. L. (author) / Grant, J. T. (author) / Pachter, R. (author) / Eyink, K. (author) / Jakubiak, R. (author) / Martinez, G. (author) / Ramana, C. V. (author)
APPLIED SURFACE SCIENCE ; 292 ; 74-85
2014-01-01
12 pages
Article (Journal)
English
DDC:
621.35
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