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Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Aida, H. / Takeda, H. / Kim, S. W. / Aota, N. / Koyama, K. / Yamazaki, T. / Doi, T.

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Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Aida, H. / Takeda, H. / Kim, S. W. / Aota, N. / Koyama, K. / Yamazaki, T. / Doi, T.

Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Aida, H. / Takeda, H. / Kim, S. W. / Aota, N. / Koyama, K. / Yamazaki, T. / Doi, T.

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Document information

Title:

Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Contributors:

Aida, H. (author) / Takeda, H. (author) / Kim, S. W. (author) / Aota, N. (author) / Koyama, K. (author) / Yamazaki, T. (author) / Doi, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 292 ; 531-536

Publication date:

2014-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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