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    Demonstration of High Quality 4H-SiC Epitaxy by Using the Two-Step Growth Method

    New search for: Mitani, Y.
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    Demonstration of High Quality 4H-SiC Epitaxy by Using the Two-Step Growth Method

    New search for: Mitani, Y.
    New search for: Tomita, N.
    New search for: Hamano, K.
    New search for: Tarutani, M.
    New search for: Tanaka, T.
    New search for: Ohno, A.
    New search for: Kuroiwa, T.
    New search for: Toyoda, Y.
    New search for: Imaizumi, M.
    New search for: Sumitani, H.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

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    Demonstration of High Quality 4H-SiC Epitaxy by Using the Two-Step Growth Method

    New search for: Mitani, Y.
    New search for: Tomita, N.
    New search for: Hamano, K.
    New search for: Tarutani, M.
    New search for: Tanaka, T.
    New search for: Ohno, A.
    New search for: Kuroiwa, T.
    New search for: Toyoda, Y.
    New search for: Imaizumi, M.
    New search for: Sumitani, H.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

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    Document information
    Title:

    Demonstration of High Quality 4H-SiC Epitaxy by Using the Two-Step Growth Method

    Contributors:

    Mitani, Y. (author) / Tomita, N. (author) / Hamano, K. (author) / Tarutani, M. (author) / Tanaka, T. (author) / Ohno, A. (author) / Kuroiwa, T. (author) / Toyoda, Y. (author) / Imaizumi, M. (author) / Sumitani, H. (author)

    Published in:

    Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 167-170

    MATERIALS SCIENCE FORUM ; 778/780

    Publication date:

    2014-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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