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Basal Plane Dislocations from Inclusions in 4H-SiC Epitaxy
Basal Plane Dislocations from Inclusions in 4H-SiC Epitaxy
Basal Plane Dislocations from Inclusions in 4H-SiC Epitaxy
Stahlbush, R.E. (author) / Mahadik, N.A. (author) / O loughlin, M.J. (author) / Okumura, H. / Harima, H. / Kimoto, T. / Yoshimoto, M. / Watanabe, H. / Hatayama, T. / Matsuura, H.
2014-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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