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    Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

    New search for: Sako, H.
    New search for: Yamashita, T.
    New search for: Tamura, K.
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    Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

    New search for: Sako, H.
    New search for: Yamashita, T.
    New search for: Tamura, K.
    New search for: Sasaki, M.
    New search for: Nagaya, M.
    New search for: Kido, T.
    New search for: Kawata, K.
    New search for: Kato, T.
    New search for: Kojima, K.
    New search for: Tsukimoto, S.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

    New search for: Sako, H.
    New search for: Yamashita, T.
    New search for: Tamura, K.
    New search for: Sasaki, M.
    New search for: Nagaya, M.
    New search for: Kido, T.
    New search for: Kawata, K.
    New search for: Kato, T.
    New search for: Kojima, K.
    New search for: Tsukimoto, S.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

    Contributors:

    Sako, H. (author) / Yamashita, T. (author) / Tamura, K. (author) / Sasaki, M. (author) / Nagaya, M. (author) / Kido, T. (author) / Kawata, K. (author) / Kato, T. (author) / Kojima, K. (author) / Tsukimoto, S. (author)

    Published in:

    Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 370-373

    MATERIALS SCIENCE FORUM ; 778/780

    Publication date:

    2014-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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