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Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

Sako, H. / Yamashita, T. / Tamura, K. / Sasaki, M. / Nagaya, M. / Kido, T. / Kawata, K. / Kato, T. / Kojima, K. / Tsukimoto, S.

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Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

Sako, H. / Yamashita, T. / Tamura, K. / Sasaki, M. / Nagaya, M. / Kido, T. / Kawata, K. / Kato, T. / Kojima, K. / Tsukimoto, S.

Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

Sako, H. / Yamashita, T. / Tamura, K. / Sasaki, M. / Nagaya, M. / Kido, T. / Kawata, K. / Kato, T. / Kojima, K. / Tsukimoto, S.

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Titel:

Microstructural Analysis of Damaged Layer Introduced during Chemo-Mechanical Polishing

Beteiligte:

Sako, H. (Autor:in) / Yamashita, T. (Autor:in) / Tamura, K. (Autor:in) / Sasaki, M. (Autor:in) / Nagaya, M. (Autor:in) / Kido, T. (Autor:in) / Kawata, K. (Autor:in) / Kato, T. (Autor:in) / Kojima, K. (Autor:in) / Tsukimoto, S. (Autor:in)

Erschienen in:

Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 370-373

MATERIALS SCIENCE FORUM ; 778/780

Erscheinungsdatum:

01.01.2014

Format / Umfang:

4 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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