Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Thinning of a Two-Inch Silicon Carbide Wafer by Plasma Chemical Vaporization Machining Using a Slit Electrode

    New search for: Okada, Y.
    New search for: Nishikawa, H.
    New search for: Sano, Y.
    New search for: Yamamura, K.
    New search for: Yamauchi, K.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Thinning of a Two-Inch Silicon Carbide Wafer by Plasma Chemical Vaporization Machining Using a Slit Electrode

    New search for: Okada, Y.
    New search for: Nishikawa, H.
    New search for: Sano, Y.
    New search for: Yamamura, K.
    New search for: Yamauchi, K.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thinning of a Two-Inch Silicon Carbide Wafer by Plasma Chemical Vaporization Machining Using a Slit Electrode

    New search for: Okada, Y.
    New search for: Nishikawa, H.
    New search for: Sano, Y.
    New search for: Yamamura, K.
    New search for: Yamauchi, K.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Thinning of a Two-Inch Silicon Carbide Wafer by Plasma Chemical Vaporization Machining Using a Slit Electrode

    Contributors:

    Okada, Y. (author) / Nishikawa, H. (author) / Sano, Y. (author) / Yamamura, K. (author) / Yamauchi, K. (author) / Okumura, H. / Harima, H. / Kimoto, T. / Yoshimoto, M. / Watanabe, H.

    Published in:

    Silicon Carbide and Related Materials 2013 ; 750-753

    MATERIALS SCIENCE FORUM ; 778/780

    Publication date:

    2014-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Thinning of 2-Inch SiC Wafer by Plasma Chemical Vaporization Machining Using Cylindrical Rotary Electrode

    Sano, Y. / Kato, T. / Aida, K. et al. | British Library Online Contents | 2011

    Thinning of SiC Wafer by Plasma Chemical Vaporization Machining

    Sano, Y. / Kato, T. / Hori, T. et al. | British Library Online Contents | 2010

    Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining

    Kato, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009

    Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining

    Kato, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009

    Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide

    Sano, Y. / Watanabe, M. / Kato, T. et al. | British Library Online Contents | 2009

    Back to top