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    Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias

    New search for: Legrand, J.
    New search for: Pigeat, P.
    New search for: Easwarakhanthan, T.
    New search for: Rinnert, H.

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    Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias

    New search for: Legrand, J.
    New search for: Pigeat, P.
    New search for: Easwarakhanthan, T.
    New search for: Rinnert, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias

    New search for: Legrand, J.
    New search for: Pigeat, P.
    New search for: Easwarakhanthan, T.
    New search for: Rinnert, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias

    Contributors:

    Legrand, J. (author) / Pigeat, P. (author) / Easwarakhanthan, T. (author) / Rinnert, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 307 ; 189-196

    Publication date:

    2014-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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