Silicon monoxide role in silicon nanocluster formation during Si-rich oxide layer annealing

Silicon monoxide role in silicon nanocluster formation during Si-rich oxide layer annealing – Monte Carlo simulation

Mikhantiev, E. A. / Neizvestny, I. G. / Usenkov, S. V. / Shwartz, N. L.

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Silicon monoxide role in silicon nanocluster formation during Si-rich oxide layer annealing – Monte Carlo simulation

Mikhantiev, E. A. / Neizvestny, I. G. / Usenkov, S. V. / Shwartz, N. L.

Silicon monoxide role in silicon nanocluster formation during Si-rich oxide layer annealing – Monte Carlo simulation

Mikhantiev, E. A. / Neizvestny, I. G. / Usenkov, S. V. / Shwartz, N. L.

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Document information

Title:

Silicon monoxide role in silicon nanocluster formation during Si-rich oxide layer annealing – Monte Carlo simulation

Contributors:

Mikhantiev, E. A. (author) / Neizvestny, I. G. (author) / Usenkov, S. V. (author) / Shwartz, N. L. (author)

Published in:

COMPUTATIONAL MATERIALS SCIENCE ; 90 ; 99-105

Publication date:

2014-01-01

Size:

7 pages

ISSN:

0927-0256

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 510

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