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    Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology

    New search for: Meng, R.L.
    New search for: Zhang, H.Q.
    New search for: Liu, H.
    New search for: Tang, F.

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    Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology

    New search for: Meng, R.L.
    New search for: Zhang, H.Q.
    New search for: Liu, H.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology

    New search for: Meng, R.L.
    New search for: Zhang, H.Q.
    New search for: Liu, H.
    New search for: Tang, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Tolerance Analysis of Comb-Driving Double Ended Tuning Fork Resonator Fabricated by DRIE Technology

    Contributors:

    Meng, R.L. (author) / Zhang, H.Q. (author) / Liu, H. (author) / Tang, F.

    Published in:

    MICRO-NANO TECHNOLOGY XV ; 1375-1380

    KEY ENGINEERING MATERIALS ; 609/610

    Publication date:

    2014-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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