Influence of Fabrication Parameter on the Nanostructure of SiNWs under HF/AgNO~3/Fe(NO~3)~3 Etching System: Fid-Bau Portal

Influence of Fabrication Parameter on the Nanostructure of SiNWs under HF/AgNO~3/Fe(NO~3)~3 Etching System

Xiao, Y.Y. / Chen, X.H. / Ma, W.H. / Li, S.Y. / Li, Y.P. / He, J.L. / Li, J. / Zhang, H.

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Influence of Fabrication Parameter on the Nanostructure of SiNWs under HF/AgNO~3/Fe(NO~3)~3 Etching System

Xiao, Y.Y. / Chen, X.H. / Ma, W.H. / Li, S.Y. / Li, Y.P. / He, J.L. / Li, J. / Zhang, H.

Influence of Fabrication Parameter on the Nanostructure of SiNWs under HF/AgNO~3/Fe(NO~3)~3 Etching System

Xiao, Y.Y. / Chen, X.H. / Ma, W.H. / Li, S.Y. / Li, Y.P. / He, J.L. / Li, J. / Zhang, H.

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Document information

Title:

Influence of Fabrication Parameter on the Nanostructure of SiNWs under HF/AgNO~3/Fe(NO~3)~3 Etching System

Contributors:

Xiao, Y.Y. (author) / Chen, X.H. (author) / Ma, W.H. (author) / Li, S.Y. (author) / Li, Y.P. (author) / He, J.L. (author) / Li, J. (author) / Zhang, H. (author)

Published in:

MATERIALS SCIENCE FORUM ; 809/810 ; 93-98

Publication date:

2015-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Electroless chemical etching of silicon in aqueous NH"4F/AgNO"3/HNO"3 solution

Megouda, N. / Hadjersi, T. / Szunerits, S. et al. | British Library Online Contents | 2013

Influence of AgNO~3 Concentration on Nano-Ag/SPE Electrode

Ya, C. / Kangping, Y. / Jian, T. | British Library Online Contents | 2005

Influence of fabrication parameters on the nanostructure of Si-NWs under HF/Fe(NO~3)~3 etching system

Xiao, Y. / Chen, X. / Ma, W. et al. | British Library Online Contents | 2015