Influence of fabrication parameters on the nanostructure of Si-NWs under HF/Fe(NO~3)~3 etching system: Fid-Bau Portal

Influence of fabrication parameters on the nanostructure of Si-NWs under HF/Fe(NO~3)~3 etching system

Xiao, Y. / Chen, X. / Ma, W. / Li, S. / Li, Y. / He, J. / Zhang, H. / Li, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Influence of fabrication parameters on the nanostructure of Si-NWs under HF/Fe(NO~3)~3 etching system

Xiao, Y. / Chen, X. / Ma, W. / Li, S. / Li, Y. / He, J. / Zhang, H. / Li, J.

Influence of fabrication parameters on the nanostructure of Si-NWs under HF/Fe(NO~3)~3 etching system

Xiao, Y. / Chen, X. / Ma, W. / Li, S. / Li, Y. / He, J. / Zhang, H. / Li, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Influence of fabrication parameters on the nanostructure of Si-NWs under HF/Fe(NO~3)~3 etching system

Contributors:

Xiao, Y. (author) / Chen, X. (author) / Ma, W. (author) / Li, S. (author) / Li, Y. (author) / He, J. (author) / Zhang, H. (author) / Li, J. (author)

Published in:

International journal of materials research ; 106 ; 406-413

Publication date:

2015-01-01

Size:

8 pages

ISSN:

1862-5282

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669.9

Xiao, Y.Y. / Chen, X.H. / Ma, W.H. et al. | British Library Online Contents | 2015

SR-stimulated etching and OMVPE growth for semiconductor nanostructure fabrication

Nonogaki, Y. / Hatate, H. / Oga, R. et al. | British Library Online Contents | 2000

Nanostructure Fabrication I

Prof. Cleland, Andrew N. | Springer Verlag | 2003

Nanostructure Fabrication II

Prof. Cleland, Andrew N. | Springer Verlag | 2003

Metal-assisted chemical etching for designable monocrystalline silicon nanostructure

Li, Meicheng / Li, Yingfeng / Liu, Wenjian et al. | British Library Online Contents | 2016