Electrical Activation of B^+-Ions Implanted into 4H-SiC: Fid-Bau Portal

Electrical Activation of B^+-Ions Implanted into 4H-SiC

Tsirimpis, T. / Krieger, M. / Weber, H.B. / Pensl, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Electrical Activation of B^+-Ions Implanted into 4H-SiC

Tsirimpis, T. / Krieger, M. / Weber, H.B. / Pensl, G.

Electrical Activation of B^+-Ions Implanted into 4H-SiC

Tsirimpis, T. / Krieger, M. / Weber, H.B. / Pensl, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Electrical Activation of B^+-Ions Implanted into 4H-SiC

Contributors:

Tsirimpis, T. (author) / Krieger, M. (author) / Weber, H.B. (author) / Pensl, G. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R. / Seyller, T.

Published in:

Silicon Carbide and Related Materials 2009 ; 697-700

MATERIALS SCIENCE FORUM ; 645/648

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Yokota, K. / Nakamura, T. / Miyashita, F. et al. | British Library Online Contents | 1995

Electrical Activation of Implanted Phosphorus Ions in (0001)/(11&unknown;20)-Oriented 4H-SiC

Schmid, F. / Laube, M. / Pensl, G. et al. | British Library Online Contents | 2002

Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Li, F. / Sharma, Y. / Shah, V. et al. | British Library Online Contents | 2015

Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Li, Fan / Sharma, Yogesh / Shah, Vishal et al. | British Library Online Contents | 2015

Al^+ Implanted 4H-SiC: Improved Electrical Activation and Ohmic Contacts

Nipoti, R. / Hallen, A. / Parisini, A. et al. | British Library Online Contents | 2013