Preparation of ScAlN film on Hastelloy alloys under different sputtering power: Fid-Bau Portal

Preparation of ScAlN film on Hastelloy alloys under different sputtering power

Yang, Y. / Zhou, D. / Yang, C. / Feng, F. / Yang, J. / Hu, Q.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Preparation of ScAlN film on Hastelloy alloys under different sputtering power

Yang, Y. / Zhou, D. / Yang, C. / Feng, F. / Yang, J. / Hu, Q.

Preparation of ScAlN film on Hastelloy alloys under different sputtering power

Yang, Y. / Zhou, D. / Yang, C. / Feng, F. / Yang, J. / Hu, Q.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Preparation of ScAlN film on Hastelloy alloys under different sputtering power

Contributors:

Yang, Y. (author) / Zhou, D. (author) / Yang, C. (author) / Feng, F. (author) / Yang, J. (author) / Hu, Q. (author)

Published in:

MATERIALS LETTERS ; 161 ; 26-28

Publication date:

2015-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

Similar titles

Method for Manufacturing ScAlN Target

HOPMAN WILLEM CORNELIS LAMBERT / DEKKERS JAN MATTHIJN | European Patent Office | 2024

Free access

ScAlN LAMINATE AND MANUFACTURING METHOD THEREOF

YAMADA HIROSHI / HIRATA KENJI / UEHARA MASAHITO et al. | European Patent Office | 2022

Free access

Influence of N"2/Ar-flow ratio on crystal quality and electrical properties of ScAlN thin film prepared by DC reactive magnetron sputtering

Yang, J. c. / Meng, X. q. / Yang, C. t. et al. | British Library Online Contents | 2013

Preparation method of flexible Hastelloy alloy substrate multi-layer structure anti-ferroelectric film

CHENG JINRONG / WANG PENGFEI | European Patent Office | 2024

Free access

Synthesis of diamond films on Hastelloy

Godbole, V. P. et al. | British Library Online Contents | 1992