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Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

Wang, J. / Wang, T. / Pan, G. / Lu, X.

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Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

Wang, J. / Wang, T. / Pan, G. / Lu, X.

Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

Wang, J. / Wang, T. / Pan, G. / Lu, X.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

Contributors:

Wang, J. (author) / Wang, T. (author) / Pan, G. (author) / Lu, X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 378 ; 130-135

Publication date:

2016-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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