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Fluid pressure and its effects on chemical mechanical polishing

Zhou, C. / Shan, L. / Robert Hight, J. / Ng, S. H. / Danyluk, S.

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Fluid pressure and its effects on chemical mechanical polishing

Zhou, C. / Shan, L. / Robert Hight, J. / Ng, S. H. / Danyluk, S.

Fluid pressure and its effects on chemical mechanical polishing

Zhou, C. / Shan, L. / Robert Hight, J. / Ng, S. H. / Danyluk, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fluid pressure and its effects on chemical mechanical polishing

Contributors:

Zhou, C. (author) / Shan, L. (author) / Robert Hight, J. (author) / Ng, S. H. (author) / Danyluk, S. (author)

Published in:

WEAR -LAUSANNE- ; 253 ; 430-437

Publication date:

2002-01-01

Size:

8 pages

ISSN:

0043-1648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11292

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