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    Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

    New search for: Wang, Jie
    New search for: Wang, Tongqing
    New search for: Pan, Guoshun
    New search for: Lu, Xinchun

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    Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

    New search for: Wang, Jie
    New search for: Wang, Tongqing
    New search for: Pan, Guoshun
    New search for: Lu, Xinchun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

    New search for: Wang, Jie
    New search for: Wang, Tongqing
    New search for: Pan, Guoshun
    New search for: Lu, Xinchun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effects of catalyst concentration and ultraviolet intensity on chemical mechanical polishing of GaN

    Contributors:

    Wang, Jie (author) / Wang, Tongqing (author) / Pan, Guoshun (author) / Lu, Xinchun (author)

    Published in:

    Applied surface science ; 378 ; 130-135

    Publication date:

    2016-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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