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    Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon

    New search for: Kanomata, K.
    New search for: Tokoro, K.
    New search for: Imai, T.
    New search for: Pansila, P.
    New search for: Miura, M.
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    Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon

    New search for: Kanomata, K.
    New search for: Tokoro, K.
    New search for: Imai, T.
    New search for: Pansila, P.
    New search for: Miura, M.
    New search for: Ahmmad, B.
    New search for: Kubota, S.
    New search for: Hirahara, K.
    New search for: Hirose, F.

    Access

    Access via TIB
    Check availability in my library
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    Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon

    New search for: Kanomata, K.
    New search for: Tokoro, K.
    New search for: Imai, T.
    New search for: Pansila, P.
    New search for: Miura, M.
    New search for: Ahmmad, B.
    New search for: Kubota, S.
    New search for: Hirahara, K.
    New search for: Hirose, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon

    Contributors:

    Kanomata, K. (author) / Tokoro, K. (author) / Imai, T. (author) / Pansila, P. (author) / Miura, M. (author) / Ahmmad, B. (author) / Kubota, S. (author) / Hirahara, K. (author) / Hirose, F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 387 ; 497-502

    Publication date:

    2016-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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