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    Infrared study on room-temperature atomic layer deposition of TiO"2 using tetrakis(dimethylamino)titanium and remote-plasma-excited water vapor

    New search for: Kanomata, K.
    New search for: Pansila, P.
    New search for: Ahmmad, B.
    New search for: Kubota, S.
    New search for: Hirahara, K.
    New search for: Hirose, F.

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    Infrared study on room-temperature atomic layer deposition of TiO"2 using tetrakis(dimethylamino)titanium and remote-plasma-excited water vapor

    New search for: Kanomata, K.
    New search for: Pansila, P.
    New search for: Ahmmad, B.
    New search for: Kubota, S.
    New search for: Hirahara, K.
    New search for: Hirose, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Infrared study on room-temperature atomic layer deposition of TiO"2 using tetrakis(dimethylamino)titanium and remote-plasma-excited water vapor

    New search for: Kanomata, K.
    New search for: Pansila, P.
    New search for: Ahmmad, B.
    New search for: Kubota, S.
    New search for: Hirahara, K.
    New search for: Hirose, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Infrared study on room-temperature atomic layer deposition of TiO"2 using tetrakis(dimethylamino)titanium and remote-plasma-excited water vapor

    Contributors:

    Kanomata, K. (author) / Pansila, P. (author) / Ahmmad, B. (author) / Kubota, S. (author) / Hirahara, K. (author) / Hirose, F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 308 ; 328-332

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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