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    Morphology and stress at silicon-glass interface in anodic bonding

    New search for: Tang, J.
    New search for: Cai, C.
    New search for: Ming, X.
    New search for: Yu, X.
    New search for: Zhao, S.
    New search for: Tu, S. T.
    New search for: Liu, H.

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    Morphology and stress at silicon-glass interface in anodic bonding

    New search for: Tang, J.
    New search for: Cai, C.
    New search for: Ming, X.
    New search for: Yu, X.
    New search for: Zhao, S.
    New search for: Tu, S. T.
    New search for: Liu, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Morphology and stress at silicon-glass interface in anodic bonding

    New search for: Tang, J.
    New search for: Cai, C.
    New search for: Ming, X.
    New search for: Yu, X.
    New search for: Zhao, S.
    New search for: Tu, S. T.
    New search for: Liu, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Morphology and stress at silicon-glass interface in anodic bonding

    Contributors:

    Tang, J. (author) / Cai, C. (author) / Ming, X. (author) / Yu, X. (author) / Zhao, S. (author) / Tu, S. T. (author) / Liu, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 387 ; 139-148

    Publication date:

    2016-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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