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Crack-free Al0.5Ga0.5N epilayer grown on SiC substrate by in situ SiNx interlayer
Crack-free Al0.5Ga0.5N epilayer grown on SiC substrate by in situ SiNx interlayer
Crack-free Al0.5Ga0.5N epilayer grown on SiC substrate by in situ SiNx interlayer
Tao, Pengcheng (author) / Liang, Hongwei (author) / Xia, Xiaochuan (author) / Chen, Yuanpeng (author) / Yang, Chao (author) / Liu, Jianxun (author) / Zhu, Zhifu (author) / Liu, Yang (author) / Shen, Rensheng (author) / Luo, Yingmin (author)
Materials science in semiconductor processing ; 41 ; 291-296
2016-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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