Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Ellipsometric, XPS and FTIR study on SiCN films deposited by hot-wire chemical vapor deposition method

    New search for: Rahman, Md. Momtazur
    New search for: Hasan, Syed Kamrul

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Ellipsometric, XPS and FTIR study on SiCN films deposited by hot-wire chemical vapor deposition method

    New search for: Rahman, Md. Momtazur
    New search for: Hasan, Syed Kamrul

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ellipsometric, XPS and FTIR study on SiCN films deposited by hot-wire chemical vapor deposition method

    New search for: Rahman, Md. Momtazur
    New search for: Hasan, Syed Kamrul

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Ellipsometric, XPS and FTIR study on SiCN films deposited by hot-wire chemical vapor deposition method

    Contributors:

    Rahman, Md. Momtazur (author) / Hasan, Syed Kamrul (author)

    Published in:

    Materials science in semiconductor processing ; 42 ; 373-377

    Publication date:

    2016-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method

    Nakanishi, H. / Ogata, T. / Kadotani, Y. et al. | British Library Conference Proceedings | 2013

    Investigations on hardness of rf sputter deposited SiCN thin films

    Sundaram, K. B. / Alizadeh, Z. / Todi, R. M. et al. | British Library Online Contents | 2004

    Effect of filament biasing on nanocrystalline-Si films deposited by hot wire chemical vapor deposition

    Swain, B. P. / Swain, B. S. / Yang, S. M. et al. | British Library Online Contents | 2009

    Effect of H2 dilution on a-CN:H films deposited by hot-wire chemical vapor deposition

    Swain, B. P. / Swain, B. S. / Hwang, N. M. | British Library Online Contents | 2009

    Human serum albumin (HSA) adsorption onto a-SiC:H thin films deposited by hot wire chemical vapor deposition

    Swain, B. P. | British Library Online Contents | 2006

    Back to top