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Te implantation in Ge(001) for n-type doping applications
Te implantation in Ge(001) for n-type doping applications
Te implantation in Ge(001) for n-type doping applications
Perrin Toinin, J. (author) / Portavoce, A. (author) / Hoummada, K. (author) / Texier, M. (author) / Bertoglio, M. (author) / Bernardini, S. (author) / Chow, L. (author)
Materials science in semiconductor processing ; 42 ; 215-218
2016-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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