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    Experiment study on electroplated diamond wire saw slicing single-crystal silicon

    New search for: Gao, Yufei
    New search for: Ge, Peiqi
    New search for: Liu, Tengyun

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    Experiment study on electroplated diamond wire saw slicing single-crystal silicon

    New search for: Gao, Yufei
    New search for: Ge, Peiqi
    New search for: Liu, Tengyun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Experiment study on electroplated diamond wire saw slicing single-crystal silicon

    New search for: Gao, Yufei
    New search for: Ge, Peiqi
    New search for: Liu, Tengyun

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Similar titles

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    Document information
    Title:

    Experiment study on electroplated diamond wire saw slicing single-crystal silicon

    Contributors:

    Gao, Yufei (author) / Ge, Peiqi (author) / Liu, Tengyun (author)

    Published in:

    Materials science in semiconductor processing ; 56 ; 106-114

    Publication date:

    2016-01-01

    Size:

    9 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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