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    Electrical, optical, structural and chemical properties of Al2TiO5 films for high-к gate dielectric applications

    New search for: Addepalli, Suresh
    New search for: Suda, Uthanna

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    Electrical, optical, structural and chemical properties of Al2TiO5 films for high-к gate dielectric applications

    New search for: Addepalli, Suresh
    New search for: Suda, Uthanna

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrical, optical, structural and chemical properties of Al2TiO5 films for high-к gate dielectric applications

    New search for: Addepalli, Suresh
    New search for: Suda, Uthanna

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Electrical, optical, structural and chemical properties of Al2TiO5 films for high-к gate dielectric applications

    Contributors:

    Addepalli, Suresh (author) / Kolla, Lakshmi Ganapathi (author) / Suda, Uthanna (author)

    Published in:

    Materials science in semiconductor processing ; 57 ; 137-146

    Publication date:

    2017-01-01

    Size:

    10 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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