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    Influence of Si wafer thinning processes on (sub)surface defects

    New search for: Inoue, Fumihiro
    New search for: Jourdain, Anne
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    Influence of Si wafer thinning processes on (sub)surface defects

    New search for: Inoue, Fumihiro
    New search for: Jourdain, Anne
    New search for: Peng, Lan
    New search for: Phommahaxay, Alain
    New search for: De Vos, Joeri
    New search for: Rebibis, Kenneth June
    New search for: Miller, Andy
    New search for: Sleeckx, Erik
    New search for: Beyne, Eric
    New search for: Uedono, Akira

    Access

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    Check availability in my library
    Order at Subito €

    Influence of Si wafer thinning processes on (sub)surface defects

    New search for: Inoue, Fumihiro
    New search for: Jourdain, Anne
    New search for: Peng, Lan
    New search for: Phommahaxay, Alain
    New search for: De Vos, Joeri
    New search for: Rebibis, Kenneth June
    New search for: Miller, Andy
    New search for: Sleeckx, Erik
    New search for: Beyne, Eric
    New search for: Uedono, Akira

    Access

    Access via TIB
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    Access

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    Document information
    Title:

    Influence of Si wafer thinning processes on (sub)surface defects

    Contributors:

    Inoue, Fumihiro (author) / Jourdain, Anne (author) / Peng, Lan (author) / Phommahaxay, Alain (author) / De Vos, Joeri (author) / Rebibis, Kenneth June (author) / Miller, Andy (author) / Sleeckx, Erik (author) / Beyne, Eric (author) / Uedono, Akira (author)

    Published in:

    Applied surface science ; 404 ; 82-87

    Publication date:

    2017-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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