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Selective etching of silicon in aqueous KOH

Chen, L.-C. / Chen, M. / Wan, C.-C. / Tsaur, T.-H. / Lien, C.

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Selective etching of silicon in aqueous KOH

Chen, L.-C. / Chen, M. / Wan, C.-C. / Tsaur, T.-H. / Lien, C.

Selective etching of silicon in aqueous KOH

Chen, L.-C. / Chen, M. / Wan, C.-C. / Tsaur, T.-H. / Lien, C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Selective etching of silicon in aqueous KOH

Contributors:

Chen, L.-C. (author) / Chen, M. (author) / Wan, C.-C. (author) / Tsaur, T.-H. (author) / Lien, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 34 ; 180-187

Publication date:

1995-01-01

Size:

8 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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