Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

Berdova, M. / Wiemer, C. / Lamperti, A. et al. | British Library Online Contents | 2016

Hafnium silicon oxide films prepared by atomic layer deposition

Kukli, K. / Ritala, M. / Leskela, M. et al. | British Library Online Contents | 2004

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Aarik, J. / Aidla, A. / Mandar, H. et al. | British Library Online Contents | 2001

Atomic layer deposition of hafnium and zirconium silicate thin films

Vainonen-Ahlgren, E. / Tois, E. / Ahlgren, T. et al. | British Library Online Contents | 2003

Characteristics of hafnium oxide grown on silicon by atomic-layer deposition using tetrakis(ethylmethylamino)hafnium and water vapor as precursors

Chiou, Y.-K. / Chang, C.-H. / Wu, T.-B. | British Library Online Contents | 2007